Nanometer particle analysis

Chemicals of Multi-element analysis of nanoparticles by ICP-MS
we investigate the capability of single particle inductively coupled plasma mass spectrometry (ICP-MS) mass analyzers to determine the composition, size distribution, and concentration of a series of nanoparticles that are used

Applications:
Chemical quality identification; Yield Improvement of Semiconductor Manufacturing Process ; product differences

 

  • Linear of Fe Nanoparticle RM in Chemicals

  • Mixed Nanoparticle in UPW

      NIST RM : 30nm / 60nm Au

  • Analysis Capability