26 01 Chemical Reagent |
C 165 Determination of trace metal impurities |
Ammonia Solution |
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Reference . EMI C21-0708 |
Document No. : L-S12 |
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Sb, Be, Bi, Cd, Ce, Cs, Eu, Gd, Ga, Ho, In, Pb, Li, Mg, Mn, Mo, Rh, Rb, Ag, Sr, Ta, Th, Ti, U, V, Sc, Tl : 0.5 ppt to 100 ppb |
Al, Ba, Ca, Cr, Co, Cu, Ge, Hf, Fe, K, Na, Sn, W, Y, Zn, Zr : 1 ppt to 100 ppb |
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Ni : 2 ppt to 100 ppb |
Hydrofluoric Acid |
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ReferenceSEMI C28-0611 |
Document No. : L-S08 |
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Bi, Ce, Cs, Co, Eu, Gd, Ga, Hf, Ho, In, Pb, Li, Mg, Mn, K, Rh, Rb, Ag, Na, Sr, Ta, Th, Ti, W, U, V, Y, Zr, Sc, Tl : 0.001 to 100 ppb |
Al, Sb, Ba, Be, Cd, Ca, Cr, Cu, Ge, Fe, Mo, Ni, Sn, Zn: (0.002 to 100) ppb |
IPA |
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Document No. : L-S24 |
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Al, Ca, Cu, Ge, Fe, K, Na, Zn : 1 ppt to 100 ppb |
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Sb, Ba, Be, Bi, Cd, Ce, Cs, Cr, Co, Eu, Gd, Ga, Hf, Ho, In, Pb, Li, Mg, Mn, Mo, Ni, Rh, Rb, Ag, Sr, Ta, Th, Sn, Ti, W, U, V, Y, Zr, Sc, Tl : 0.5 ppt to 100 ppb |
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Sulfuric Acid |
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ReferenceSEMI C44-0708 |
Document No. : L-S10 |
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Al, Sb, Cd, Ca, Cr, Cu, Ga, Ge, Fe, Ni, K, Na, Sn, Ti, W, V, Tl : 8 ppt to 1 ppm |
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Ba, Be, Bi, Ce, Cs, Co, Eu, Gd, Hf, Ho, In, Pb, Li, Mg, Mn, Mo, Rh, Rb, Ag, Sr, Ta, Th, U, Y, Zr, Sc :5 ppt to 1 ppm |
Zn : 40 ppt to 1 ppm |
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Nitric Acid |
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ReferenceSEMI C35-0708 |
Document No. : L-S11 |
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Bi, Ce, Cs, Co, Eu, Gd, Ga, Hf, Ho, In, Pb, Li, Mg, Mn, K, Rh, Rb, Ag, Na, Sr, Ta, Th, Ti, W, U, V, Y, Zr, Sc, Tl : 0.001 to 100 ppb |
Al, Sb, Ba, Be, Cd, Ca, Cr, Cu, Ge, Fe, Mo, Ni, Sn, Zn : 0.002 to 100 ppb |
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Hydrogen Peroxide Acid |
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ReferenceSEMI C30-1110 |
Document No. : L-S09 |
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Bi, Ce, Cs, Co, Eu, Gd, Ga, Hf, Ho, In, Pb, Li, Mg, Mn, K, Rh, Rb, Ag, Na, Sr, Ta, Th, Ti, W, U, V, Y, Zr, Sc, Tl : 0.001 to 100 ppb |
Al, Sb, Ba, Be, Cd, Ca, Cr, Cu, Ge, Fe, Mo, Ni, Sn, Zn : 0.002 to 100 ppb |
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