NFA-C350
On-line MA/MB Contaminants
Monitoring Equipment
NFA-C350
On-line MA/MB Contaminants Monitoring Equipment
Real-time detection of MA/MB contaminants used in semiconductor process environments for Fab air quality monitoring. Intelligent system introduces Fab air into the anion/cation free sampling module (Impinger) to concentrate trace MA/MB and detected by integrated ion chromatograph technology.
On-line MA/MB Contaminants Monitoring Equipment
Real-time detection of MA/MB contaminants used in semiconductor process environments for Fab air quality monitoring. Intelligent system introduces Fab air into the anion/cation free sampling module (Impinger) to concentrate trace MA/MB and detected by integrated ion chromatograph technology.
| Feature |
Stationary type MA / MB Contaminants online monitoring equipment
Max. sample port : 100-port for Fab air online sampling. 2 manual port for offline sampling and matching analysis
Typical detection are can reach radius of 150 m and area of 70,650 m2, (option for 200 ｍ above)
Automatic Elution preparation module to save time and avoid operator issue
Auto-STD Correction System, include multi-ion STD solution with COA
Integrated auto-cleaning、sampling、concentrate process and optimized detection recipe to NF-HMI easy operation
User friendly remote assistance design
Database library and reporting system
Max. sample port : 100-port for Fab air online sampling. 2 manual port for offline sampling and matching analysis
Typical detection are can reach radius of 150 m and area of 70,650 m2, (option for 200 ｍ above)
Automatic Elution preparation module to save time and avoid operator issue
Auto-STD Correction System, include multi-ion STD solution with COA
Integrated auto-cleaning、sampling、concentrate process and optimized detection recipe to NF-HMI easy operation
User friendly remote assistance design
Database library and reporting system
| Specification |
| Description | |
| Application | In Semiconductor process for environment/ air monitoring、product quality control、water quality control、 ….. etc. |
| Measuring ion | MA/ Anion : F -、Cl - 、Br - 、NO 2- 、NO3 - 、PO4 3- 、SO4 2- 、COOH-、CH3COO-… 等 |
| MB/ Cation : NH4+、Na+ 、Mg2+ 、Ca2+、K + …… etc. | |
| Total Acid : HCl、HBr、HF、H2SO4 (H2S、SOX)、H3PO4、HNO3、HNO2、CH2O2及CH3COOH， | |
| Total basic : NHx | |
| Accuracy | R value >0.995 ; QC sample recovery rate ±20% |
| Stability | RSD < 15 % (2.5 ppb Multi-ion mixed standard solution 2.5 ppb in UPW) |
| Recovery | Recovery rate 100 ±20 % |
| Utility chemicals | Anion/Cation Elution、Suppressor reagent |
| Utility gas | N2、CDA |
| Utility power | 1 Phase 220 V，20 A，50~60 Hz |
| Size / Weight | 1507 mm X 973 mm X 2210 mm ; 500 kg |
| << more information please contact us >> | |
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