製程分析測項
整頁閱覽
 
Application Target Sampling method Instruments Type MDL
零件/產品表面污染物檢測

濾網、零部件、建材等

揮發性有機氣體逸散檢測
VOCs Outgassing TD-GC-MS Organic 0.8 ng
Metal Surface-extraction (NF method) ICP-MS Inorganic 0.7 ng
F-/Cl-/NO2-/Br-/NO3-/PO43-/SO42- /NH4+ Surface-extraction (NF method) IC Inorganic 220 ng
VOCs Headspace TD-GC-MS Organic ppb
P/S compounds TD-GC-FPD Inorganic/Organic ppm
環境/無塵室/製程氣體空降分子檢測

煙道廢氣排放檢測
VOCs Tube/Canister/Bag/On-line TD-GC-MS Organic sub pptv
TD-GC-QTOF pptv
F-/Cl-/NO2-/Br-/NO3-/PO43-/SO42-
CHOO
-/CH3COO-/
Li
+/NH4+/Na+/Mg2+/K+/Ca2+/Mn2+/Sr2+/Ba2+
Impinger (NF method) IC Inorganic 1 ppbv
特定氣體不純物分析
氣體純度檢測
CO/CO2/N2/Ar/H2/He/O2/CH4/C2H6/C3H8 Canister GC-TCD Inorganic/Organic ppm
GC-PDHID 0.1ppm
總碳氫化合物(THC)檢測 THC/CH4/NMHC GC-FID Organic 1ppm (Methane)
硫/磷化合物檢測 P/S compounds GC-FPD Inorganic/Organic ppm
高分子添加物解析
高分子材料單體解析 
Involatile organic compounds/Polymer  -- Py-GC-MS Organic --
有機溶劑雜質分析 VOCs Direct/ Dilution GC-MS Organic ppb 
差異性分析 VOCs Direct/ Dilution GC-QTOF Organic sub ppb
混酸成分分析

F-/Cl-/NO2-/Br-/NO3-/PO43-/SO42- /

COOH-/CH3COO-/Li+/NH4+/Na+/

Mg2+/K+/Ca2+/Mn2+/Sr2+/Ba2+

Direct/ Dilution IC Inorganic < 10 ppb
超純水、化學品中陰陽離子不純物分析
超純水品質檢測
製程化學品(酸、鹼、有機溶劑)檢測
Metal Direct/ Dilution ICP-MS Inorganic ppq
酸濃度分析 Acid / Base  -- Auto-titrator Inorganic %
奈米粒子粒徑、濃度分析 Nanoparticle Direct/ Dilution SNP-ICP-MS Inorganic 10 nm