製程分析測項

Application

Target

Sampling method

Instruments

Type

MDL

零件/產品表面污染物檢測
濾網
、零組件、建材等
揮發性有機氣體逸散檢測

VOCs

Outgassing

TD-GC-MS

Organic

0.8 ng

Metal

Surface-extraction
(NF method)

ICP-MS

Inorganic

0.7 ng

F-/Cl-/NO2-/Br-/NO3-
PO43-/SO42- /NH4+

Surface-extraction
(NF method)

IC

Inorganic

220 ng

VOCs

Headspace

TD-GC-MS

Organic

ppbv

P/S compounds

TD-GC-FPD

Inorganic
Orgnaic

ppmv

環境/無塵室/製程氣體空降分子檢測
煙道廢氣排放檢測

VOCs

Tube/Canister
Bag/On-line

TD-GC-MS

Organic

single
ppbv

TD-GC-QTOF

sub ppbv

F-/Cl-/NO2-/Br-/NO3-
PO43-/SO42-
CHOO
-/CH3COO-/
Li
+/NH4+/Na+/Mg2+
K+/Ca2+/Mn2+/Sr2+/Ba2+

Impinger
(NF method)

IC

Inorganic

1 ug/m3

特定氣體不純物分析

氣體純度檢測

CO/CO2/N2/Ar/H2
He/O2/CH4/C2H6/C3H8

Canister

GC-TCD

Inorganic
Orgnaic

ppm

GC-PDHID

0.1ppm

總碳氫化合物(THC)檢測

THC/CH4/NMHC

GC-FID

Organic

1ppm
(Methane)

/磷化合物檢測

P/S compounds

GC-FPD

Inorganic
Orgnaic

ppm

高分子添加物解析、高分子材料單體解析

Involatile organic 
compounds/Polymer

 --

Py-GC-MS

Organic

--

有機溶劑雜質分析

VOCs

Direct/ Dilution

GC-MS

Organic

ppb

差異性分析

VOCs

Direct/ Dilution

GC-QTOF

Organic

sub ppb

混酸成分分析

F-/Cl-/NO2-/Br-/NO3-
PO43-/SO42- 
COOH
-/CH3COO-/Li+
NH4+/Na+/Mg2+/K+
Ca2+/Mn2+/Sr2+/Ba2+

Direct/ Dilution

IC

Inorganic

 %

超純水、化學品中陰陽離子不純物分析

 2 ppb

超純水品質檢測

製程化學品(酸、鹼、有機溶劑)檢測

Metal

Direct/ Dilution

ICP-MS

Inorganic

ppq

酸濃度分析

Acid / Base

 --

Auto-titrator

Inorganic

%

奈米粒子粒徑、濃度分析

Nanoparticle

Direct/ Dilution

SNP-ICP-MS

Inorganic

10 nm