Special /Bulk gas analysis
Special /Bulk gas analysis
Special gases or bulk gases for semiconductor processes, such as: SiH4、NF3、NH3、CF4、N2、H2、O2、Ar..Among them, trace impurities CO/CO2/N2/Ar/H2/He/O2/THC(CH4) ) Analysis can be performed by GC-PDHID / GC-TCD / GC-FID
Application
Special Gas impurity analysis (photoelectric panel process, LED process, semiconductor process and other gas quality confirmation); gas purity test ; gas purification efficiency analysis
Special Gas impurity analysis (photoelectric panel process, LED process, semiconductor process and other gas quality confirmation); gas purity test ; gas purification efficiency analysis
