IS-T10R
Semi On-line Trace Element Analysis Equipment
IS-T10R
Semi On-line Trace Element Analysis Equipment
Based on NF technology, traditional QC lab process (sampling、calibration 、 QC-check and reporting) can be easily replaced by IS-T10R. It is not only effective for semiconductor industry but also for fine chemicals manufacturer.
Feature |
PFA sample bottle of batch sampling for analysis.
Undiluted measurement for ultra-pure chemicals of 70% HNO3, 49% HF, 29% NH4OH, 31% H2O2, IPA, …etc.
Build-in safety interlock design for multi-chemicals switch
Exclusive multi-element NF-STD
ICPQQQ recipes certified by NF Lab with 1ppt analysis capability under TAF certification
Unique on-line auto-dilute module
Intelligent NF-HMI control interface
User friendly remote assistance design
AI lock spot and upload for OOC/OOS with auto-retained module (option)
Auto-upload to customer CIM system with customized report layout
Specification |
Description | |
Application | 70% HNO3、49% HF、NH4F、BOE、98% H2SO4、29% NH4OH 、31% H2O2、IPA 、86% H3PO4、nBAC、TMHA、NMP、DMSO … etc. |
NF provides professional customized application based on unique process for different chemicals | |
Element | >60 Elements |
Accuracy | R value >0.995 ; QC sample recovery rate ±20% |
Detection limit | < 0.5 ppt (Reference attachment MDL table) |
Stability | RSD <10 % ( 5 ppt Multi-element mixed standard solution spike in 49% HF) |
Recovery | Recovery rate ±30 % (1 ppt Multi-element mixed standard solution spike in |
49% HF / 9.6%H2SO4/31% H2O2) | |
Utility gas | N2、CDA |
Utility power | 3 Phase 220 V,30 A,50~60 Hz |
Size / Weight | 900 mm X 1070 mm X 2256 mm ; 160 kg |
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